Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6805454 | MEMS structure with mechanical overdeflection limiter | Bryan P. Staker, James Spallas, Lawrence P. Muray | 2004-10-19 |
| 6791742 | MEMS structure with raised electrodes | Bryan P. Staker, Lawrence P. Muray | 2004-09-14 |
| 6759800 | Diamond supported photocathodes for electron sources | Timothy N. Thomas, Xiaolan Chen, Steven Thomas Coyle, Ming Lun Yu, Marian Mankos | 2004-07-06 |
| 6724002 | Multiple electron beam lithography system with multiple beam modulated laser illumination | Marian Mankos, Steven Thomas Coyle, Allan L. Sagle, Paul C. Allen, Xiaolan Chen +5 more | 2004-04-20 |
| 6717325 | Method and apparatus for actuation of a two-axis MEMS device using three actuation elements | William C. Dickson | 2004-04-06 |
| 6693735 | MEMS structure with surface potential control | Lawrence P. Muray, Bryan P. Staker | 2004-02-17 |