Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828574 | Modulator driven photocathode electron beam generator | — | 2004-12-07 |
| 6751000 | Reflective diffraction of radiation beams for image registration | Samuel C. Howells | 2004-06-15 |
| 6731320 | Laser pattern generator | Michael Bohan, Morris H. Green, Henry Christopher Hamaker | 2004-05-04 |
| 6724002 | Multiple electron beam lithography system with multiple beam modulated laser illumination | Marian Mankos, Steven Thomas Coyle, Andres Fernandez, Allan L. Sagle, Xiaolan Chen +5 more | 2004-04-20 |