Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6724002 | Multiple electron beam lithography system with multiple beam modulated laser illumination | Marian Mankos, Steven Thomas Coyle, Andres Fernandez, Paul C. Allen, Xiaolan Chen +5 more | 2004-04-20 |