SK

Shigeru Kawamura

TL Tokyo Electron Limited: 1 patents #120 of 414Top 30%
Overall (2004): #116,659 of 270,089Top 45%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6800546 Film forming method by radiating a plasma on a surface of a low dielectric constant film Nobuo Konishi, Mitsuaki Iwashita, Hiroki Ohno, Masahito Sugiura 2004-10-05