Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800546 | Film forming method by radiating a plasma on a surface of a low dielectric constant film | Nobuo Konishi, Mitsuaki Iwashita, Hiroki Ohno, Shigeru Kawamura | 2004-10-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800546 | Film forming method by radiating a plasma on a surface of a low dielectric constant film | Nobuo Konishi, Mitsuaki Iwashita, Hiroki Ohno, Shigeru Kawamura | 2004-10-05 |