Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800546 | Film forming method by radiating a plasma on a surface of a low dielectric constant film | Nobuo Konishi, Hiroki Ohno, Shigeru Kawamura, Masahito Sugiura | 2004-10-05 |
| 6683006 | Film forming method and film forming apparatus | Nobuo Konishi | 2004-01-27 |