MA

Masami Akimoto

TL Tokyo Electron Limited: 2 patents #53 of 414Top 15%
Overall (2004): #52,587 of 270,089Top 20%
2
Patents 2004

Issued Patents 2004

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
6716478 Coating film forming apparatus and coating film forming method Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more 2004-04-06
6676757 Coating film forming apparatus and coating unit Takahiro Kitano, Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga +2 more 2004-01-13