Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6808942 | Method for controlling a critical dimension (CD) in an etch process | Brian Smith, Jeffrey Stephan Hodges, Dale R. Burrows, Yu-Lun Lin | 2004-10-26 |
| 6799136 | Method of estimation of wafer polish rates | Gregory A. Miller, Steven T. Jenkins | 2004-09-28 |