Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6808942 | Method for controlling a critical dimension (CD) in an etch process | Nital S. Patel, Jeffrey Stephan Hodges, Dale R. Burrows, Yu-Lun Lin | 2004-10-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6808942 | Method for controlling a critical dimension (CD) in an etch process | Nital S. Patel, Jeffrey Stephan Hodges, Dale R. Burrows, Yu-Lun Lin | 2004-10-26 |