Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828251 | Method for improved plasma etching control | Jen-Cheng Liu, Li-Chih Chaio | 2004-12-07 |
| 6797627 | Dry-wet-dry solvent-free process after stop layer etch in dual damascene process | Hsin-Ching Shih, Li-Te Lin, Li-Chie Chiao | 2004-09-28 |