Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6764967 | Method for forming low thermal budget sacrificial oxides | Vincent Pai, Kuo-Chi Tu, Chung-Wei Chang, Chun-Yao Chen | 2004-07-20 |
| 6743732 | Organic low K dielectric etch with NH3 chemistry | Li-Te Lin, Li-Chih Chao | 2004-06-01 |