Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797968 | Ion beam processing method and apparatus therefor | Mitsukuni Tsukihara, Yoshitaka Amano, Michiro Sugitani, Hiroki Murooka, Hiroshi Matsushita | 2004-09-28 |
| 6794661 | Ion implantation apparatus capable of increasing beam current | Mitsukuni Tsukihara, Michiro Sugitani, Hiroki Murooka, Hiroshi Matsushita | 2004-09-21 |
| 6720563 | Ion implantation apparatus and ion implantation method | — | 2004-04-13 |