Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815697 | Ion beam charge neutralizer and method therefor | Makoto Sano | 2004-11-09 |
| 6797968 | Ion beam processing method and apparatus therefor | Mitsukuni Tsukihara, Yoshitaka Amano, Mitsuaki Kabasawa, Hiroki Murooka, Hiroshi Matsushita | 2004-09-28 |
| 6794661 | Ion implantation apparatus capable of increasing beam current | Mitsukuni Tsukihara, Mitsuaki Kabasawa, Hiroki Murooka, Hiroshi Matsushita | 2004-09-21 |