Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797968 | Ion beam processing method and apparatus therefor | Mitsukuni Tsukihara, Yoshitaka Amano, Mitsuaki Kabasawa, Michiro Sugitani, Hiroshi Matsushita | 2004-09-28 |
| 6794661 | Ion implantation apparatus capable of increasing beam current | Mitsukuni Tsukihara, Mitsuaki Kabasawa, Michiro Sugitani, Hiroshi Matsushita | 2004-09-21 |