Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806443 | Ceramic susceptor | Akira Kuibira, Hirohiko Nakata | 2004-10-19 |
| 6770379 | Susceptor for semiconductor manufacturing equipment and process for producing the same | Yasuhisa Yushio, Hirohiko Nakata | 2004-08-03 |
| 6716304 | Wafer holder for semiconductor manufacturing apparatus, and method of manufacturing the wafer holder | Akira Kuibira, Hirohiko Nakata, Kenjiro Higaki, Takashi Ishii, Yasuyuki Matsui | 2004-04-06 |
| 6696103 | Aluminium nitride ceramics and method for preparing the same | Kouhei Shimoda, Kazuya Kamitake, Hirohiko Nakata, Kazutaka Sasaki, Harutoshi Ukegawa | 2004-02-24 |