Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6716304 | Wafer holder for semiconductor manufacturing apparatus, and method of manufacturing the wafer holder | Akira Kuibira, Hirohiko Nakata, Masuhiro Natsuhara, Takashi Ishii, Yasuyuki Matsui | 2004-04-06 |