Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806443 | Ceramic susceptor | Masuhiro Natsuhara, Hirohiko Nakata | 2004-10-19 |
| 6716304 | Wafer holder for semiconductor manufacturing apparatus, and method of manufacturing the wafer holder | Hirohiko Nakata, Kenjiro Higaki, Masuhiro Natsuhara, Takashi Ishii, Yasuyuki Matsui | 2004-04-06 |