Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6736987 | Silicon etching apparatus using XeF2 | — | 2004-05-18 |
| 6724204 | Probe structure for testing semiconductor devices and method for fabricating the same | Sangjun Park | 2004-04-20 |
| 6694504 | Method of fabricating an electrostatic vertical and torsional actuator using one single-crystalline silicon wafer | JongPal Kim | 2004-02-17 |
| 6689694 | Micromechanical system fabrication method using (111) single crystalline silicon | Sangwoo Lee, Sangjun Park | 2004-02-10 |