Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6694504 | Method of fabricating an electrostatic vertical and torsional actuator using one single-crystalline silicon wafer | Dong-il Cho | 2004-02-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6694504 | Method of fabricating an electrostatic vertical and torsional actuator using one single-crystalline silicon wafer | Dong-il Cho | 2004-02-17 |