Issued Patents 2004
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815243 | Method of fabricating a microelectromechanical system (MEMS) device using a pre-patterned substrate | Mark A. Lucak, Richard D. Harris, Michael J. Knieser | 2004-11-09 |
| 6803755 | Microelectromechanical system (MEMS) with improved beam suspension | Patrick C. Herbert, Jeffrey R. Annis, Jun Yao, Winfred L. Morris, Henric Larsson +1 more | 2004-10-12 |
| 6798312 | Microelectromechanical system (MEMS) analog electrical isolator | Richard D. Harris, Michael J. Knieser, Ernst Dummermuth | 2004-09-28 |
| 6794271 | Method for fabricating a microelectromechanical system (MEMS) device using a pre-patterned bridge | Richard D. Harris | 2004-09-21 |
| 6768628 | Method for fabricating an isolated microelectromechanical system (MEMS) device incorporating a wafer level cap | Richard D. Harris, Michael J. Knieser, Mark A. Lucak | 2004-07-27 |
| 6761829 | Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void | Richard D. Harris, Michael J. Knieser, Mark A. Lucak | 2004-07-13 |
| 6756310 | Method for constructing an isolate microelectromechanical system (MEMS) device using surface fabrication techniques | Mark A. Lucak, Richard D. Harris, Michael J. Knieser | 2004-06-29 |
| 6690178 | On-board microelectromechanical system (MEMS) sensing device for power semiconductors | Richard D. Harris | 2004-02-10 |