Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815243 | Method of fabricating a microelectromechanical system (MEMS) device using a pre-patterned substrate | Mark A. Lucak, Richard D. Harris, Robert J. Kretschmann | 2004-11-09 |
| 6798312 | Microelectromechanical system (MEMS) analog electrical isolator | Richard D. Harris, Ernst Dummermuth, Robert J. Kretschmann | 2004-09-28 |
| 6768628 | Method for fabricating an isolated microelectromechanical system (MEMS) device incorporating a wafer level cap | Richard D. Harris, Robert J. Kretschmann, Mark A. Lucak | 2004-07-27 |
| 6761829 | Method for fabricating an isolated microelectromechanical system (MEMS) device using an internal void | Richard D. Harris, Robert J. Kretschmann, Mark A. Lucak | 2004-07-13 |
| 6756310 | Method for constructing an isolate microelectromechanical system (MEMS) device using surface fabrication techniques | Robert J. Kretschmann, Mark A. Lucak, Richard D. Harris | 2004-06-29 |