Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6803755 | Microelectromechanical system (MEMS) with improved beam suspension | Patrick C. Herbert, Jun Yao, Winfred L. Morris, Henric Larsson, Richard D. Harris +1 more | 2004-10-12 |