Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800210 | Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants | Satyadev Patel, Andrew Huibers, Gregory P. Schaadt | 2004-10-05 |
| 6741383 | Deflectable micromirrors with stopping mechanisms | Andrew Huibers, Satyadev Patel | 2004-05-25 |