Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800210 | Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants | Satyadev Patel, Andrew Huibers, Peter Heureux | 2004-10-05 |