Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800210 | Method for making a micromechanical device by removing a sacrificial layer with multiple sequential etchants | Satyadev Patel, Gregory P. Schaadt, Peter Heureux | 2004-10-05 |
| 6798561 | Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements | — | 2004-09-28 |
| 6741383 | Deflectable micromirrors with stopping mechanisms | Peter Heureux, Satyadev Patel | 2004-05-25 |
| 6726333 | Projection display with multiply filtered light | Peter W. Richards | 2004-04-27 |
| 6690502 | Double substrate reflective spatial light modulator with self-limiting micro-mechanical elements | — | 2004-02-10 |