Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6709565 | Method and apparatus for uniform electropolishing of damascene ic structures by selective agitation | Steven T. Mayer, Robert J. Contolini, John Drewery | 2004-03-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6709565 | Method and apparatus for uniform electropolishing of damascene ic structures by selective agitation | Steven T. Mayer, Robert J. Contolini, John Drewery | 2004-03-23 |