Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831731 | Projection optical system and an exposure apparatus with the projection optical system | Yasuhiro Omura, Naomasa Shiraishi, Issey Tanaka, Toshihiko Ozawa, Shunsuke Niisaka | 2004-12-14 |
| 6707529 | Exposure method and apparatus | Takashi Aoki, Naomasa Shiraishi | 2004-03-16 |