Issued Patents 2004
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831731 | Projection optical system and an exposure apparatus with the projection optical system | Yasuhiro Omura, Issey Tanaka, Soichi Owa, Toshihiko Ozawa, Shunsuke Niisaka | 2004-12-14 |
| 6798495 | Exposure apparatus, exposure method and device production method | Hiroyuki Nagasaka | 2004-09-28 |
| 6775063 | Optical system and exposure apparatus having the optical system | — | 2004-08-10 |
| 6731371 | Exposure method and apparatus, and method of fabricating a device | — | 2004-05-04 |
| 6727025 | Photomask and exposure method | — | 2004-04-27 |
| 6710855 | Projection exposure apparatus and method | — | 2004-03-23 |
| 6710854 | Projection exposure apparatus | Yuji Kudo, Saburo Kamiya | 2004-03-23 |
| 6707529 | Exposure method and apparatus | Takashi Aoki, Soichi Owa | 2004-03-16 |
| 6704092 | Projection exposure method and apparatus that produces an intensity distribution on a plane substantially conjugate to a projection optical system pupil plane | — | 2004-03-09 |
| 6700641 | Temperature control method and exposure apparatus thereby | — | 2004-03-02 |
| 6677088 | Photomask producing method and apparatus and device manufacturing method | Nobutaka Magome | 2004-01-13 |
| 6677601 | Method of detecting position of mark on substrate, position detection apparatus using this method, and exposure apparatus using this position detection apparatus | — | 2004-01-13 |