Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831731 | Projection optical system and an exposure apparatus with the projection optical system | Yasuhiro Omura, Naomasa Shiraishi, Soichi Owa, Toshihiko Ozawa, Shunsuke Niisaka | 2004-12-14 |
| 6710930 | Illumination optical system and method of making exposure apparatus | Takeshi Suzuki | 2004-03-23 |
| RE38465 | Exposure apparatus | Hitoshi Matsuzawa, Mikihiko Ishii | 2004-03-16 |