Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6734762 | MEMS resonators and method for manufacturing MEMS resonators | Feng Niu | 2004-05-11 |
| 6673667 | Method for manufacturing a substantially integral monolithic apparatus including a plurality of semiconductor materials | Jonathan Gorrell | 2004-01-06 |