Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6811714 | Micromachined component and method of manufacture | Gordana S. Nielsen | 2004-11-02 |
| 6707351 | Tunable MEMS resonator and method for tuning | — | 2004-03-16 |
| 6673667 | Method for manufacturing a substantially integral monolithic apparatus including a plurality of semiconductor materials | Kenneth D. Cornett | 2004-01-06 |