Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6734762 | MEMS resonators and method for manufacturing MEMS resonators | Kenneth D. Cornett | 2004-05-11 |
| 6710680 | Reduced size, low loss MEMS torsional hinges and MEMS resonators employing such hinges | Wayne W. Chiou | 2004-03-23 |