Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6813943 | Method and apparatus for conditioning a gas flow to improve a rate of pressure change measurement | John A. Smith | 2004-11-09 |
| 6810308 | Apparatus and method for mass flow controller with network access to diagnostics | Nicholas Kottenstette, Jesse E. Ambrosina | 2004-10-26 |
| 6783630 | Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling | David Tao, Mathias Koch, Douglas Brown, Hossein Zarrin | 2004-08-31 |
| 6779394 | Apparatus and method for thermal management of a mass flow controller | Jesse E. Ambrosina, Isao Suzuki | 2004-08-24 |
| 6766260 | Mass flow ratio system and method | Jesse E. Ambrosina, Nicholas Kottenstette | 2004-07-20 |
| 6712084 | Apparatus and method for pressure fluctuation insensitive mass flow control | Nicholas Kottenstette, Jesse E. Ambrosina | 2004-03-30 |