Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6783630 | Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling | Ali Shajii, David Tao, Mathias Koch, Douglas Brown | 2004-08-31 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6783630 | Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling | Ali Shajii, David Tao, Mathias Koch, Douglas Brown | 2004-08-31 |