Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6783630 | Segmented cold plate for rapid thermal processing (RTP) tool for conduction cooling | Ali Shajii, Mathias Koch, Douglas Brown, Hossein Zarrin | 2004-08-31 |
| 6695886 | Optical path improvement, focus length change compensation, and stray light reduction for temperature measurement system of RTP tool | Douglas Brown, Robert D. Meadows, Mathias Koch | 2004-02-24 |