Issued Patents 2004
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6805615 | Planarizing solutions, planarizing machines and methods for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies | Karl M. Robinson | 2004-10-19 |
| 6790130 | Semiconductor processing methods of removing conductive material | Trung T. Doan | 2004-09-14 |
| 6746316 | Methods and apparatuses for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies on planarizing pads | Dinesh Chopra | 2004-06-08 |
| 6743724 | Planarization process for semiconductor substrates | Trung T. Doan, Guy T. Blalock, Mark Durcan | 2004-06-01 |
| 6736926 | Inline monitoring of pad loading for CuCMP and developing an endpoint technique for cleaning | Dinesh Chopra | 2004-05-18 |
| 6730954 | Method of depositing tungsten nitride using a source gas comprising silicon | Trung T. Doan | 2004-05-04 |
| 6716090 | Methods and apparatuses for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies on planarizing pads | Dinesh Chopra | 2004-04-06 |
| 6712676 | Methods and apparatuses for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies on planarizing pads | Dinesh Chopra | 2004-03-30 |
| 6709317 | Method and apparatus for uniformly planarizing a microelectronic substrate | Stephen J. Kramer | 2004-03-23 |
| 6690077 | Antireflective coating and field emission display device, semiconductor device and wiring line comprising same | Everett A. McTeer, Russell C. Zahorik | 2004-02-10 |
| 6672946 | Methods and apparatuses for mechanical and chemical-mechanical planarization of microelectronic-device substrate assemblies on planarizing pads | Dinesh Chopra | 2004-01-06 |