Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6743289 | Thermal annealing process for producing low defect density single crystal silicon | Robert J. Falster, Alan Wang | 2004-06-01 |
| 6686260 | Process for producing thermally annealed wafers having improved internal gettering | Robert J. Falster, Harold W. Korb | 2004-02-03 |