Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6782525 | Wafer process critical dimension, alignment, and registration analysis simulation tool | Mario Garza, Neal Callan, Travis Brist, Paul G. Filseth | 2004-08-24 |
| 6764749 | Method to improve the resolution of a photolithography system by use of a coupling layer between the photo resist and the ARC | Michael Berman | 2004-07-20 |