Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794293 | Trench etch process for low-k dielectrics | Siyi Li, S. M. Reza Sadjadi, David R. Pirkle, Steve Lassig, Sean S. Kang +1 more | 2004-09-21 |
| 6780569 | Post-development treatment of patterned photoresist to promote cross-linking of polymer chains | Eric A. Hudson, Reza Sadjadi, Daxing Ren, Wan-Lin Chen, Douglas Keil | 2004-08-24 |