Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794293 | Trench etch process for low-k dielectrics | Siyi Li, David R. Pirkle, Steve Lassig, Sean S. Kang, Vinay Pohray +1 more | 2004-09-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794293 | Trench etch process for low-k dielectrics | Siyi Li, David R. Pirkle, Steve Lassig, Sean S. Kang, Vinay Pohray +1 more | 2004-09-21 |