Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6780569 | Post-development treatment of patterned photoresist to promote cross-linking of polymer chains | Eric A. Hudson, Daxing Ren, Wan-Lin Chen, Douglas Keil, Peter Cirigliano | 2004-08-24 |