Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6827793 | Drip manifold for uniform chemical delivery | Don E. Anderson, Katrina Mikhaylich, John M. de Larios | 2004-12-07 |
| 6726530 | End-point detection system for chemical mechanical polishing applications | Katrina Mikhaylich, Yehiel Gotkis | 2004-04-27 |
| 6711775 | System for cleaning a semiconductor wafer | Katrina Mikhaylich, Don E. Anderson | 2004-03-30 |
| 6679763 | Apparatus and method for qualifying a chemical mechanical planarization process | John M. Boyd, Katrina Mikhaylich | 2004-01-20 |