Issued Patents 2004
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6834656 | Plasma process for removing polymer and residues from substrates | Han Qingyuan, Carlo Waldfried, Orlando Escorcia, Gary A. Dahrooge | 2004-12-28 |
| 6803319 | Process for optically erasing charge buildup during fabrication of an integrated circuit | Alan C. Janos, Anthony Sinnot, Kevin Alexander STEWART, Robert Douglas Mohondro | 2004-10-12 |
| 6759098 | Plasma curing of MSQ-based porous low-k film materials | Qingyuan Han, Carlo Waldfried, Orlando Escorcia, Ralph Albano, Jeff Jang +1 more | 2004-07-06 |
| 6759133 | High modulus, low dielectric constant coatings | Kyuha Chung, Qingyuan Han, Youfan Liu, Eric Scott Moyer, Michael John Spaulding | 2004-07-06 |
| 6756085 | Ultraviolet curing processes for advanced low-k materials | Carlo Waldfried, Qingyuan Han, Orlando Escorcia | 2004-06-29 |
| 6734120 | Method of photoresist ash residue removal | Stuart Rounds, John Scott Hallock, Michael W. Owens, Mahmoud Dahimene | 2004-05-11 |
| 6673197 | Chemical plasma cathode | Joel Penelon | 2004-01-06 |