Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6834656 | Plasma process for removing polymer and residues from substrates | Han Qingyuan, Carlo Waldfried, Gary A. Dahrooge, Ivan L. Berry, III | 2004-12-28 |
| 6759098 | Plasma curing of MSQ-based porous low-k film materials | Qingyuan Han, Carlo Waldfried, Ralph Albano, Ivan L. Berry, III, Jeff Jang +1 more | 2004-07-06 |
| 6756085 | Ultraviolet curing processes for advanced low-k materials | Carlo Waldfried, Qingyuan Han, Ivan L. Berry, III | 2004-06-29 |