MO

Michael W. Owens

AT Axcelis Technologies: 1 patents #18 of 57Top 35%
📍 Orlando, FL: #60 of 248 inventorsTop 25%
🗺 Florida: #923 of 3,935 inventorsTop 25%
Overall (2004): #151,736 of 270,089Top 60%
1
Patents 2004

Issued Patents 2004

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6734120 Method of photoresist ash residue removal Ivan L. Berry, III, Stuart Rounds, John Scott Hallock, Mahmoud Dahimene 2004-05-11