Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6767428 | Method and apparatus for chemical mechanical planarization | Yehiel Gotkis, Rod Kistler | 2004-07-27 |
| 6676493 | Integrated planarization and clean wafer processing system | Yehiel Gotkis | 2004-01-13 |