Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6794285 | Slurry for CMP, and method of manufacturing semiconductor device | Gaku Minamihaba, Hiroyuki Yano | 2004-09-21 |
| 6740590 | AQUEOUS DISPERSION, AQUEOUS DISPERSION FOR CHEMICAL MECHANICAL POLISHING USED FOR MANUFACTURE OF SEMICONDUCTOR DEVICES, METHOD FOR MANUFACTURE OF SEMICONDUCTOR DEVICES, AND METHOD FOR FORMATION OF EMBEDDED WRITING | Hiroyuki Yano, Gaku Minamihaba, Katsuya Okumura, Akira Iio, Masayuki Hattori | 2004-05-25 |