Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824833 | Stacked film, insulating film and substrate for semiconductor | Manabu Sekiguchi, Matthias Patz, Atsushi Shiota, Kinji Yamada | 2004-11-30 |
| 6800330 | Composition for film formation, method of film formation, and silica-based film | Eiji Hayashi, Atsushi Shiota, Kinji Yamada | 2004-10-05 |
| 6797453 | Radiation sensitive composition for forming an insulating film, insulating film and display device | Shinji Shiraki, Masayoshi Suzuki, Hirofumi Sasaki, Kazuaki Niwa | 2004-09-28 |
| 6787193 | Method for the formation of silica film, silica film, insulating film, and semiconductor device | Eiji Hayashi, Atsushi Shiota, Kinji Yamada | 2004-09-07 |
| 6749944 | Stacked film, method for the formation of stacked film, insulating film, and substrate for semiconductor | Manabu Sekiguchi, Atsushi Shiota, Kinji Yamada | 2004-06-15 |