Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824833 | Stacked film, insulating film and substrate for semiconductor | Michinori Nishikawa, Manabu Sekiguchi, Matthias Patz, Kinji Yamada | 2004-11-30 |
| 6800330 | Composition for film formation, method of film formation, and silica-based film | Eiji Hayashi, Michinori Nishikawa, Kinji Yamada | 2004-10-05 |
| 6787193 | Method for the formation of silica film, silica film, insulating film, and semiconductor device | Eiji Hayashi, Michinori Nishikawa, Kinji Yamada | 2004-09-07 |
| 6749944 | Stacked film, method for the formation of stacked film, insulating film, and substrate for semiconductor | Michinori Nishikawa, Manabu Sekiguchi, Kinji Yamada | 2004-06-15 |