Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824833 | Stacked film, insulating film and substrate for semiconductor | Michinori Nishikawa, Matthias Patz, Atsushi Shiota, Kinji Yamada | 2004-11-30 |
| 6749944 | Stacked film, method for the formation of stacked film, insulating film, and substrate for semiconductor | Michinori Nishikawa, Atsushi Shiota, Kinji Yamada | 2004-06-15 |